| 摘要 |
The invention relates to a method for operating an arrangement embodied to produce electromagnetic radiation, especially X-radiation or extreme ultraviolet radiation. The method according to the invention is characterized by guiding particles, especially electrons, onto a target (5) by means of an adjustable focusing device (22), the particles in the target (5) producing electromagnetic radiation. At least one object, especially a calibration object (70) is penetrated by the electromagnetic radiation and a radiogram of the object is recorded. Said radiogram or a plurality of radiograms is automatically evaluated and the focusing device (22) is adjusted depending on said evaluation. |
