发明名称 |
MULTI-JOINT ROBOT AND WIRING METHOD |
摘要 |
[PROBLEMS] To provide a multi-joint robot with increased productivity, used for loading and unloading thin sheet-like workpieces, such as glass substrates for liquid crystal and semiconductor wafers, into and from a stocker. [MEANS FOR SOLVING THE PROBLEMS] The multi-joint robot (1) has a hand part (8) for placing an object to be carried; multi-joint arms (1) connected to the hand part (8), having at least two or more rotating joints (3, 4, 5), extending/retracting so as to move the hand part (8) in one direction, and disposed so as to face each other in the axial direction; a support member (10) for connecting together the multi-joint arms (2) and a moving mechanism (11) moving in the vertical direction; and a pedestal (13) installed on the moving mechanism (11) and having a swing function. A connection hole (23) is formed in the rotation center of at least one of the rotating joints (3, 4, 5).
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申请公布号 |
WO2008007517(A1) |
申请公布日期 |
2008.01.17 |
申请号 |
WO2007JP62156 |
申请日期 |
2007.06.15 |
申请人 |
KABUSHIKI KAISHA YASKAWA DENKI;SUEYOSHI, SATOSHI;TANAKA, KENTARO;MATSUO, TOMOHIRO |
发明人 |
SUEYOSHI, SATOSHI;TANAKA, KENTARO;MATSUO, TOMOHIRO |
分类号 |
B25J19/00;B25J9/06;H01L21/677 |
主分类号 |
B25J19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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