| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for drawing a color filter capable of forming patterns of second layer and thereafter at high alignment accuracy following the strain of black matrix patterns. <P>SOLUTION: The method for drawing a color filter comprises: a stage where alignment marks on a substrate are read, and strain data showing the degree of the strain in black matrix patterns of each shot are obtained; and a stage where, using a scanning exposure device provided with a plurality of exposure heads, scan exposure for forming patterns of second layer and thereafter on the substrate on an exposure stage moving to a scanning direction is performed. By performing the exposure for forming the patterns of second layer and thereafter while moving the exposure stage to a direction orthogonal to the scanning direction in accordance with the strain data of the black matrix patterns of each shot, the patterns of second layer and thereafter are divided per strain data in the direction orthogonal to the scanning direction, so as to be compensated. <P>COPYRIGHT: (C)2008,JPO&INPIT |
