OPTICAL HYBRID INTEGRATED CIRCUIT

摘要

PROBLEM TO BE SOLVED: To improve cross talk by having a structure that does not impair airtightness.

SOLUTION: The optical hybrid integrated circuit includes a planar optical waveguide circuit for which an optical waveguide 121 is formed on a substrate and an optical module which is fixed on the planar optical waveguide circuit so that the light receiving face of an optical element is optically coupled to the optical waveguide 121. The optical hybrid integrated circuit is equipped with a mirror groove 102 which is formed on the end face 104 of the optical waveguide 121 deeper than the core thereof and an optical path conversion mirror 111 which is installed inside the mirror groove 102 and which couples the light signal emitted from the end face 104 of the optical waveguide 121 to the light receiving face of the optical element. The optical waveguide 121 is formed such that the core width in the end face 104 of the optical waveguide 121 is different from the core width in the circuit in the planar optical waveguide circuit, and that the flaring angleψof the beam in the full width at half maximum of light intensity of the optical signal emitted from the end face of the optical waveguide 121 becomes narrower at least in the substrate surface.

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