| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device and a surface inspection method for detecting flaws and defects on a flat surface or a curved surface at a high speed and with high accuracy. SOLUTION: The surface inspection device 100 is provided with a movable mirror 30 and fixed mirrors 40a, 40b, and 40c in a light projection system, thereby causing the movable mirror 30 to reflect a scanning beam to the fixed mirrors 40a, 40b, and 40c to apply reflected beams from the fixed mirrors 40a, 40b, and 40c to an inspecting surface of an inspecting object 11 at angles different from each other. A light reception means 8 for detecting the positions of peak points of the reflected beams and a dispersion value (light quantity distribution) of a waveform is provided in a light reception system to receive any of the reflected beams reflected from the inspecting surface. By detecting the position of a peak point of the reflected beam and the dispersion value of the waveform, the reflection angle of the beam is measured based on the position of the peak point of the reflected beam, and further, it is determined whether there are any flaws on the inspecting surface, based on the dispersion value of the waveform. COPYRIGHT: (C)2008,JPO&INPIT
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