| 摘要 |
The present invention provides a laser irradiation apparatus and a laser irradiation method which can reduce displacement of entrance point of laser light into a diffractive optical element, when laser light enters the diffractive optical element through a beam expander optical system. When the scale of laser light emitted from a laser oscillator is enlarged through a beam expander optical system including two lenses, and the laser light enters the diffractive optical element, the emission point of the laser light and the first and second lenses are arranged such that the positions of the emission point of the laser light and the second lens are conjugate to each other by the first lens.
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