| 摘要 |
An apparatus for opening or closing an outer door of a loadlock chamber is provided to extend a life time of a seal ring remarkably by suppressing an abrasion of the seal ring maximally. An apparatus for opening or closing an outer door of a loadlock chamber includes a chamber body(10), a seal ring(20), an outer door(30), a rotation shaft(40), a rotation driving device(50), a front and rear motion driving device(60). The chamber body receives a cassette with a plurality of wafers and has a gate opened to put in and out the cassette at a side thereof. The seal ring is formed along an outer circumference of the gate not to be separated. The outer door opens and closes the gate of the chamber body with rotating at a predetermined angle about an end thereof as an axis and covering the gate from the outside. The rotation shaft rotatably supports a shaft so as to rotate an end for supporting the outer door. The rotation driving device rotates the rotation shaft at a predetermined angle. The front and rear motion driving device moves the rotation shaft forward and backward at a predetermined distance in a shaft direction.
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