发明名称 DEVICE AND METHOD FOR INCREASING MASS TRANSPORT AT LIQUID-SOLID DIFFUSION BOUNDARY LAYER
摘要 A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.
申请公布号 EP1506056(A4) 申请公布日期 2008.01.16
申请号 EP20030722015 申请日期 2003.05.02
申请人 ENTEGRIS, INC. 发明人 WU, QUNWEI;BRODEUR, CRAIG, L.;PILLION, JOHN, E.;SHYU, JIEH-HWA
分类号 B01D61/00;B01J4/04;B01J19/00;B01J19/08;B01J19/24;C01B3/50;C25B15/08;C25D5/08;C25D17/00;C25D17/10;C25F7/00;F28F13/00;F28F13/02;H01M2/16;H01M8/02;H01M8/10 主分类号 B01D61/00
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