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发明名称
A vacuum pumping system
摘要
申请公布号
GB2439948(A)
申请公布日期
2008.01.16
申请号
GB20060013788
申请日期
2006.07.12
申请人
THE BOC GROUP PLC;EDWARDS LIMITED
发明人
DAVID PAUL MANSON;CLIVE REGINALD STEER
分类号
C23C16/44;C23C16/455
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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