FLUX PIN CLEANING APPARATUS FOR SEMICONDUCTOR ELEMENT MANUFACTURING EQUIPMENT AND CLEANING METHOD THEREOF

摘要

An apparatus and a method for cleaning a flux supply pin in semiconductor fabrication are provided to quickly and surely remove flux adhered on an end of the flux supply pin which is mounted on a bottom of a flux supply pin block. A heating cleaning unit(40) applies heat to a flux supply pin to remove flux remaining on the flux supply pin. The heating cleaning unit has a heating plate(41) and a heater for heating the heating plate, so that the heat is conducted to the flux supply pin from the heating plate. A water cleaning unit(50) has a reservoir filled with cleaning water and a cleaning fabric washed by the cleaning water. The cleaning fabric comes in contact with the flux supply pin to remove the flux remaining on the flux supply pin.