| 摘要 |
<p>A motorized table apparatus comprises: a support unit (6, 7) for supporting a movement table (3) so as to allow it to move in a single axis direction relative to a stationary unit (2) which is fixed to the movement table (3); a slide member (14, 15) which is equipped on the movement table (3) and which has a length equivalent to, or more than, a moving range of the movement table (3); an ultrasonic oscillators (16, 17) which is equipped on the stationary unit (2), which moves the movement table (3), and which comprises a single piezoelectric body (26) and two drive elements (27, 28); and a pressure application unit (38) for supporting so that the two drive elements (27, 28) of the ultrasonic oscillator (16, 17) and the slide member (14, 15) are pressed by a constant force, wherein a plurality of the ultrasonic oscillators (16, 17) are equipped.</p> |
