METHOD OF HEAT TREATMENT AND HEAT TREATMENT DEVICE

摘要

A method and an apparatus for a heat treatment are provided to restrain dry spots in a dry process of a paste layer by uniformly distributing a temperature distribution of a heated target. A plurality of heating rooms(R1,R2,...,R5,R6) are connected in serial to each other. The respective heating rooms are provided with a heater(10). A transfer unit transfers a heated target from an upper position to a lower position passing through the heating rooms. An air supplying unit(13) supplies heated air to the respective heating rooms. An exhausting unit(14) exhausts the heated air from the respective heating rooms. An air supplying amount and an air exhausting amount of the heated air in the respective heating rooms are generated to a direction of which temperature of the heated target is increased.