| 摘要 |
<p>To provide a flow rate measuring device which is small in size, in which dust and the like hardly penetrate, which has high measurement accuracy, and which has a small pressure loss. A secondary flow channel comprises: a guide flow channel 22 in which an upstream side communicates with a guide port 21 serving as a first bifurcation point, and a downstream side serves as a second bifurcation point 20a; a first secondary flow channel 23 in which an upstream side is bifurcated from the guide flow channel 22 at the second bifurcation point 20a and formed so as to be parallel to a primary flow channel 12, and a downstream side communicates with a discharge port 28; a second secondary flow channel 24 in which an upstream side is bifurcated from the guide flow channel 22 at the second bifurcation point 20a and formed so as to cross the primary flow channel 12; and a third secondary flow channel (detection flow channel) 25 in which an upstream side communicates with a downstream side of the second secondary flow channel 24, a flow rate detecting element is disposed, and a downstream side communicates with the discharge port 28.</p> |
