发明名称 |
PIEZOELEKTRISCHER RESONATOR, PIEZOELEKTRISCHE VORRICHTUNG, HERSTELLUNGSVERFAHREN DERSELBEN, MOBILTELEFON UND ELEKTRONISCHE AUSRÜSTUNG WELCHE EINE PIEZOELEKTRISCHE VORRICHTUNG BENUTZEN. |
摘要 |
A piezoelectric resonator element is provided including a base portion and a plurality of resonating arms extending from the base portion. A notch part is formed in the base portion. Grooves are formed in the front and back surfaces of the resonating arms. A driving electrode is provided at least in the grooves of the resonating arms. The driving electrode has a lower layer and an electrode layer formed on the lower layer. The thickness t of the lower layer is in the range 0.07<t<0.3 micrometers. |
申请公布号 |
AT382984(T) |
申请公布日期 |
2008.01.15 |
申请号 |
AT20040025568T |
申请日期 |
2004.10.27 |
申请人 |
SEIKO EPSON CORPORATION |
发明人 |
TANAYA, HIDEO;JOKURA, TOSHINARI;OSHIRO, ATSUSHI |
分类号 |
H01L41/09;H03H9/21;H01L41/18;H01L41/22;H01L41/23;H01L41/29;H01L41/332;H03B5/32;H03H3/02;H03H9/19;H03H9/215 |
主分类号 |
H01L41/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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