发明名称 PIEZOELEKTRISCHER RESONATOR, PIEZOELEKTRISCHE VORRICHTUNG, HERSTELLUNGSVERFAHREN DERSELBEN, MOBILTELEFON UND ELEKTRONISCHE AUSRÜSTUNG WELCHE EINE PIEZOELEKTRISCHE VORRICHTUNG BENUTZEN.
摘要 A piezoelectric resonator element is provided including a base portion and a plurality of resonating arms extending from the base portion. A notch part is formed in the base portion. Grooves are formed in the front and back surfaces of the resonating arms. A driving electrode is provided at least in the grooves of the resonating arms. The driving electrode has a lower layer and an electrode layer formed on the lower layer. The thickness t of the lower layer is in the range 0.07<t<0.3 micrometers.
申请公布号 AT382984(T) 申请公布日期 2008.01.15
申请号 AT20040025568T 申请日期 2004.10.27
申请人 SEIKO EPSON CORPORATION 发明人 TANAYA, HIDEO;JOKURA, TOSHINARI;OSHIRO, ATSUSHI
分类号 H01L41/09;H03H9/21;H01L41/18;H01L41/22;H01L41/23;H01L41/29;H01L41/332;H03B5/32;H03H3/02;H03H9/19;H03H9/215 主分类号 H01L41/09
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