发明名称 MRAM over sloped pillar
摘要 An apparatus including a pillar located over a substrate and having at least one sloped surface oriented at an acute angle relative to the substrate. The apparatus also includes an MRAM stack substantially conforming to the sloped surface, the MRAM stack thereby also oriented at the acute angle relative to the substrate. The MRAM stack may comprise a plurality of substantially planar, parallel layers each oriented at an acute angle relative to the substrate.
申请公布号 US7319262(B2) 申请公布日期 2008.01.15
申请号 US20040917585 申请日期 2004.08.13
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LIU CHI-WEN;CHIANG KUO-CHING;TSENG HORNG-HUEI;TANG DENNY D.
分类号 H01L29/82;H01L21/00;H01L43/00 主分类号 H01L29/82
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