| 摘要 |
Polysilicon is deposited onto a tube or other hollow body. The hollow body replaces the slim rod of a conventional Siemens-type reactor and may be heated internally with simple resistance elements. The hollow body diameter is selected to provide a surface area much larger than that of a silicon slim rod. The hollow body material may be chosen such that, upon cooling, deposited polysilicon readily separates from the hollow body due to differences in contraction and falls into a collection container.
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