发明名称 APPARATUS AND METHOD FOR GLASS ETCHING
摘要 A method and an apparatus for etching a glass are provided to completely remove a liquid material from a glass surface by using a rinsing bath separated from a drying bath. A surface of a glass is etched using fluoric acid in an etching bath(100). A bubble generator is formed at a lower portion of the etching bath. A surface of the etched glass is cleansed using UPW(Ultra Pure Water) in a cleaning bath(200). A bubble generator is formed at a lower portion of the cleaning bath. The surface of the glass is cleaned using the UPW and preliminarily dries the glass using dry air in a rinsing and drying bath(300). The surface of the glass is completely dried using the dry air in a drying bath(400).
申请公布号 KR100794919(B1) 申请公布日期 2008.01.15
申请号 KR20060068992 申请日期 2006.07.24
申请人 SYSTEMS TECHNOLOGY INCORPORATED 发明人 KIM, JAE HWAN;KIM, JAE WOONG;LIM, BYUNG SEOK;YOU, DEA IL
分类号 H01L21/306;H01L21/3065 主分类号 H01L21/306
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