发明名称 Attenuator for attenuating wavelengths unequal to a used wavelength
摘要 There is provided an attenuator for attenuating electromagnetic radiation of wavelengths Unequal to a used wavelength, including a grating element having i) grating grooves that produce a grating period (p), and ii) a grating plane. The grating period (p) is least about 150 times higher than the used wavelength.
申请公布号 US7319509(B2) 申请公布日期 2008.01.15
申请号 US20050064594 申请日期 2005.02.24
申请人 CARL ZEISS SMT AG 发明人 SINGER WOLFGANG
分类号 G03B27/72;G21K1/06;G01D5/36;G01J3/18;G02B5/18;G02B19/00;G02B27/44;G03F7/20;G21K5/00;H01L21/027 主分类号 G03B27/72
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