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发明名称
Methods Of Forming Barrier Metal Layer Of Semiconductor Device
摘要
申请公布号
KR100794657(B1)
申请公布日期
2008.01.14
申请号
KR20060058960
申请日期
2006.06.28
申请人
发明人
分类号
H01L27/115;H01L21/3205;H01L21/8247
主分类号
H01L27/115
代理机构
代理人
主权项
地址
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