发明名称 OPTICAL ELEMENT DRIVING APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
摘要 <p>An outer ring (21) is arranged in a lens tube unit (14c). A driving mechanism (25) provided on the outer ring shifts an optical element (M), and adjusts the position and the posture of the optical element. A damper mechanism (31) for suppressing propagation of vibration to the optical element is attached to the outer ring.</p>
申请公布号 KR20080005348(A) 申请公布日期 2008.01.11
申请号 KR20077004397 申请日期 2006.04.27
申请人 NIKON CORPORATION 发明人 ISHIKAWA MITSUO
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
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