THE POWDER ELIMINATOR FOR VACUUM LINE AND IT'S METHOD

摘要

An apparatus for removing powder for a vacuum exhaust line and controlling absorption of the powder is provided to extend the replacement period of a vacuum exhaust pipe as well as a cleaning period of the vacuum exhaust pipe by avoiding stacking of powder accumulated in the vacuum exhaust pipe and by controlling curing of the powder. A vibration plate(53) is coupled to the outer part of a vacuum exhaust pipe installed between an exhaust hole and a vacuum chamber wherein a semiconductor chip or an LCD(liquid crystal display) panel is processed in the vacuum exhaust pipe. An ultrasonic vibrator(51) generates vibration, coupled to the upper surface of the vibration plate to transfer uniform vibration to the vacuum exhaust pipe through the vibration plate. An ultrasonic vibration generating and controlling unit(50) is electrically connected to the ultrasonic vibrator to be capable of generating uniform vibration in the ultrasonic vibrator, including a main body(50a) having a circuit part for supplying and controlling predetermined power. An ion supply unit(30) is electrically connected to the ultrasonic vibration generating and controlling unit to generate a predetermined quantity of ions, connected to the vacuum exhaust pipe to which the ultrasonic vibrator is coupled so as to supply the generated ions to the vacuum exhaust pipe. A vibration amplification unit(52) amplifies the intensity of the vibration generated from the ultrasonic vibrator, installed between the ultrasonic vibrator and the vibration plate.