| 摘要 |
<p>A work position information acquisition device can accurately acquire a position of a work with respect to a table. A table (14) on which a work (12) is placed is shifted relatively to imaging means (226) for imaging the portion on the table (14). Imaging information is obtained by imaging a table reference mark (214) and a work reference mark (212) by the imaging means (226). Work position information indicating the position of the work (12) with respect to the table (14) is obtained according to the shift direction position of the table (14) when the table reference mark is imaged and the work reference mark is imaged. By referencing a position fluctuation amount of the table (14) generated by the shift of the table (14) corresponding to a pre-acquired shift direction position of the table (14), a position fluctuation amount of the table (14) upon imaging the table reference mark (214) and a position fluctuation amount of the table (14) upon imaging the work reference mark (212) are obtained. An error component contained in the work position information attributed to the difference between the position fluctuation amounts is eliminated.</p> |
