| 摘要 |
A device transfer apparatus of a semiconductor device test handler is provided to adjust accurately intervals of an X-axis and a Y-axis of an adsorption nozzle constituting a picker by using a jig and an interval adjusting plate. A mount block(110,120) is installed at an upper part of a handler main body and is movable. A plurality of picker blocks in which a hole for adjusting an interval is formed are installed to be transferred horizontally along an X-axis direction. A plurality of adsorption nozzles(132,142) for adsorbing semiconductor devices are installed at a bottom of the each picker blocks. A jig for adjusting the interval of the X-axis comprises a jig body and a plurality of interval adjusting pins. The jig body is separably fixed at the mount block. The interval adjusting pins having a uniform interval are formed to be protruded along the X-axis direction of the jig body. Also the interval adjusting pins are inserted into the holes of the picker blocks, and adjust the interval of X-axis of the adsorption nozzles. |
