| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter device for improving heat radiation performance. SOLUTION: This filter device is provided with (a) a substrate, (b) a cover arranged opposite to one main face of the substrate, (c) a support layer extended along the outer edge of the substrate where the substrate and the cover are joined at intervals, and a space ("vibration space") is formed between the substrate and the cover; (d) a plurality of functional elements supported or formed on one main face of the substrate in the vibration space; (e) inter-terminal wiring formed on one main face of the substrate, and electrically connected to the plurality of terminals of the functional elements in the vibration space; (f) an elevated layer formed on one main face of the substrate on the inter-terminal wiring or adjacently to the inter-terminal wiring, and elevated toward the cover in the vibration space; and (g) a conductive member continuously formed from the upper part of the inter-terminal wiring to the upper part of the elevated layer including a section interposed between the cover and the elevated layer on the elevated layer. COPYRIGHT: (C)2008,JPO&INPIT
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