发明名称 ADAPTIVE HEIGHT EVAPORATOR
摘要 An evaporator with controllable height is provided to keep deposition density uniformly by controlling a distance between a substrate and the evaporator variably in a substrate depositing process. An evaporator with controllable height includes a crucible(100), a lifting unit(200), and a moving unit(300). The crucible keeps a deposited material inside. A material of the crucible is a conductive material or a non-conductive material like ceramic and silica. The lifting unit controls the height of the crucible. The lifting unit moves the crucible up and down. A lower part of the lifting unit is stuck to the moving unit and the upper part thereof is adhered to the crucible. The moving unit moves the crucible on a plain surface. The moving unit is formed differently according to a kind of the crucible.
申请公布号 KR20080004816(A) 申请公布日期 2008.01.10
申请号 KR20060063601 申请日期 2006.07.06
申请人 SEMES CO., LTD. 发明人 KIM, KYONG HO
分类号 C23C14/24 主分类号 C23C14/24
代理机构 代理人
主权项
地址