| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a raw material liquid supplying unit which can intensively miniaturize a liquid basin, and can downsize it by a simple flow path composition to improve the replacement ability of the remained liquid. <P>SOLUTION: The raw material liquid supplying unit 10 is constructed in such a manner that a purge gas supplying valve 30, a cleaning liquid supplying valve 40, a first raw material liquid supplying valve 50, a second raw material liquid supplying valve 60, and a drain introducing valve 70, are integrally located on an upper surface of a manifold 20 in a line in order from upstream, and a vaporizer introducing valve 80 is mounted on the left side surface of the manifold 20. Then, respective valve parts 33, 43, 53, 63, 73 of the adjacent valves among the purge gas supplying valve 30, the cleaning liquid supplying valve 40, the first raw material liquid supplying valve 50, the second raw material liquid supplying valve 60, and the drain introducing valve 70 are connected by V-shaped flow paths 23, 24, 25, 26 formed in the manifold 20. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
