| 摘要 |
PROBLEM TO BE SOLVED: To provide a recording head which does not generate warping, cracking, breaking or the like of a substrate during manufacturing, and has a high accuracy. SOLUTION: A porous silicon layer 102 is formed on a silicon substrate 101, and respective layers being constitutional elements of an inkjet recording head are formed thereon, and after a delivering opening 109 is formed, a silicon substrate 101 is cut off, and thereafter, an ink feeding opening is formed. COPYRIGHT: (C)2008,JPO&INPIT
|
