| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a coating nozzle which is capable of stably discharging a coating liquid from a discharging aperture with high precision. SOLUTION: Deficits and cracks that exit on the counter face 451 are surely eliminated because the counter face 451 which is opposite to a substrate 1 among both main faces of a sheet member 450 made of a resin is polished. Thus, the discharging aperture 45a is formed on the sheet member 450A that has been finished with excellent planarity of the counter face 451. Therefor, the discharging port 45b has always corresponding profiles to the discharging aperture 45a and can perform the desired discharge of the coating liquid. That is, if the deficits and cracks exist on the counter face 451 of the sheet member 450, the coating liquid discharged from the discharging port 45b of the sheet member 450 incorporated into the nozzle 4 is not influenced by the cracks and the like. COPYRIGHT: (C)2008,JPO&INPIT
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