发明名称 |
SEMICONDUCTOR TEST SYSTEM BY WHICH VIRTUAL TEST IS POSSIBLE, AND ITS SEMICONDUCTOR TEST METHOD |
摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor test system which can execute a virtual test and a semiconductor test method. SOLUTION: This invention is for the semiconductor test system which executes a virtual test operation without connecting to a prober, and the semiconductor test method. The semiconductor test system includes a tester providing test signals and an emulator providing virtual test results to the tester in response to the test signals. The emulator includes a virtual prober software for obtaining the virtual test results. This semiconductor test system outputs the virtual test results even when the prober is not installed, as well as the case where the prober is installed. This invention solves the problem that the prober must be set up when the tester or a test program is developed. COPYRIGHT: (C)2008,JPO&INPIT
|
申请公布号 |
JP2008004940(A) |
申请公布日期 |
2008.01.10 |
申请号 |
JP20070161518 |
申请日期 |
2007.06.19 |
申请人 |
SAMSUNG ELECTRONICS CO LTD |
发明人 |
YUN BYONG-HUI;SEO KI-MYUNG;BYUN DO-HOON |
分类号 |
H01L21/66;G01R31/28 |
主分类号 |
H01L21/66 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|