| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of stably acquiring good image information without depending on a sample condition and a photographing condition. SOLUTION: A reference electrostatic electrode 4 of a potential approximates equal to that of a sample 1, and a pair of cylindrical filter electrodes 5, 5' for sandwiching the reference electrostatic electrode 4 are provided between an electron gun 30 and an acceleration field electrode 14. Secondary electrons 51 are separated and detected depending on a magnitude of energy in generating the secondary electrons generated by the sample 1 by applying a positive potential to the cylindrical filter electrodes 5, 5', and furthermore, adjusting the potential by a control part 9. Therefore, the secondary electrons of a low energy band can be eliminated, and a component for brightening an entire image contained in an SEM image is eliminated, and good image information can be acquired stably. COPYRIGHT: (C)2008,JPO&INPIT
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