| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting device capable of surely protecting a bellows member and including a bellows mechanism capable of preventing damage of a protective plate member. SOLUTION: The cutting device includes a chuck table to be reciprocated, a cutting means for cutting an object to be processed held on the chuck table, and the bellows mechanism having one end attached to the chuck table and the other end attached to a stationary member. The bellows mechanism includes the bellows member structured to be stretchable in which a plurality of peaks and valleys are alternately formed of a sheet member, and a plurality of protective plate members mounted respectively on the plurality of peaks of the bellows member with a width wider than an interval between the adjacent peaks while the bellows member is stretched. A cover sheet is provided, which has an end on one side attached to the chuck table, covers over the plurality of protective members, and moves on the plurality of plate members as the chuck table moves. COPYRIGHT: (C)2008,JPO&INPIT |
