IC MICROFLUIDIC PLATFORM WITH INTEGRATED MAGNETIC RESONANCE PROBE

摘要

An integrated hybrid microfluidic-IC platform for single cell manipulation and microscopy and method for making the platform. In particular, the integrated platform incorporates a planar microcoil (15) embedded in a silicon substrate that is subsequently used to fabricate a CMOS IC for the platform. The CMOS IC circuitry provides a two dimensional array of microsites that can incorporate an electrode (microelectrode), sensors, and control logic. A direct conversion receiver (40) can also be embedded within the CMOS circuitry to create an integrated IC platform. A microfluidic chamber can be formed on the integrated IC platform. The integrated hybrid platform can provide an increased sensitivity for mass limited samples and high resolution manipulation of biological cells. In addition, individual cell manipulation can be performed via dielectrophoresis (DEP).