PROBE AND METHOD MEASURING CONTACT FORCE AND CONTACT LOCATION IN THREE DIMENSION USING THEREOF

摘要

A probe and a method for measuring a contact force and a contact location three-dimensionally using the same are provided to sense the contact force and the contact location in a three-dimensional space with high precision by embedding a strain gauge type sensor on the probe. A method for measuring a contact force three-dimensionally using a probe includes the steps of: attaching first and second strain gauges(1,2) on the other surface adjacent to one surface of the probe; and attaching third and fourth strain gauges(3,4) on the one surface of the probe. The method is used to precisely transfer and operate micro components. When distances from a fixing end of the probe to the first to fourth strain gauges are represented by l1, l2, l3, and l4, and a length of the probe is represented by l, l1=l3=0.3l and l2=l4=0.7l.