| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a technology for surely storing operation information of a substrate processor necessary for analysis of a fault. <P>SOLUTION: In the substrate processor 1, various logs are accumulated as a log file 162. When a fault occurs in the substrate processor 1, an alarm processing part 122 refers to an alarm definition file 161, extracts a necessary relevant log file 262 from the log file 162, and stores it in a fixed disk 24 of an information accumulation server 2. Then, fault information is generated by a fault information generation part 123 to be finally stored in the fixed disk 24 of the information accumulation server 2 as fault information DB 261. In the fault information DB 261, a fault occurring device, fault contents, and the extracted relevant log file 262 are stored in association with one another. In this way, specific contents of the fault and its cause can be analyzed quickly. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
