| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser machining apparatus capable of forming a microstructure by laser irradiation while maintaining high machining throughput, a laser machining method, and a device. <P>SOLUTION: This laser machining apparatus 1 comprises a light source 2 for emitting a linearly polarized pulse laser beam L, a beam branch element 6 for branching the pulse laser beam L emitted from the light source 2 into a plurality of beams LBs, and a stage 8 for relatively moving a workpiece 10 to be irradiated with the branch laser beams LBs along the alignment direction of the branch beams LBs. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
