METHOD OF CALIBRATING IMAGE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To inexpensively provide a method for calibrating an image measuring device for highly accurately calibrating the image measuring device by obtaining correction data to each point of image data.

SOLUTION: The calibration method comprises: imaging (image data acquiring process (ST30)) edges at different positions in an imaging region of a CCD camera while relatively moving a stage and the CCD camera in an x direction by preparing a calibration workpiece having the straight edge and mounting it on the stage so that the edge is parallel to a y axis of a machine coordinate system; detecting (imaging point detecting process) a position for imaging the edge from a drive amount of a drive mechanism; detecting (edge detecting process) the edge in the imaged image data to output the coordinate of the edge so as to obtain two-dimensionally widely distributed data; and calculating (displacement amount calculating process) each imaging point by regarding a displacement amount between an edge coordinate obtained by edge detection on the image data and an edge position obtained from the drive amount of the drive mechanism as an edge position displacement amount.

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