| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid feed pump capable of stably feeding liquid at a constant flow rate even when a trace of fluid is forcibly fed, reducing pulsation, and continuously changing a liquid feeding state. SOLUTION: In this liquid feed pump 11, two or more fluid forcibly feeding means 12, 13, 14 forcibly feeding fluid are arranged in series. The fluid forcibly feeding means 12, 13, 14 are arranged in the order of the first fluid forcibly feeding means 12, the second fluid forcibly feeding means 13, and the third fluid forcibly feeding means 14 from an upstream side toward a downstream side. The first fluid forcibly feeding means 12 sucks fluid, and prevents backflow to the upstream side. The second fluid forcibly feeding means forcibly feeds fluid, and forcibly feeds liquid from the upstream side to the downstream side. The third fluid forcibly feeding means discharges fluid, and prevents backflow from the downstream side. In the liquid feed pump 11, the fluid forcibly feeding means 12, 13, 14 forcibly feed fluid so that fluid is led to flow from the upstream side toward the downstream side by a sequence of operation. COPYRIGHT: (C)2008,JPO&INPIT |
