发明名称 POSITIONING METHOD AND POSITIONING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a positioning method and a positioning device by which a work such as a semiconductor chip or the like can be arranged at a specified position and in a specified attitude, and damages to the work can be prevented. SOLUTION: A first pressing object 11 is moved forward and a work W is pushed beyond a specified position at its end flat face 11a, and the object 11 is moved backward. Next, a second pressing object 12 is moved forward which is arranged by 180°in a reverse direction on the same line L as the first pressing object 11. Thus, the end flat face 11a of the first pressing object 11 and the end flat face 12a of the second pressing object 12 are cooperated to keep the work W in a specified attitude. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008004619(A) 申请公布日期 2008.01.10
申请号 JP20060170148 申请日期 2006.06.20
申请人 CANON MACHINERY INC 发明人 FUJINO YASUSHI
分类号 H01L21/68;H01L21/52 主分类号 H01L21/68
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