| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate film for dicing which does not almost have occurrence of cut waste (waste of a thread shape or a whisker shape, which is caused from film after dicing) in a dicing process. SOLUTION: The substrate film for dicing comprises thermoplastic elastomer composition where rubber particles bridged in thermoplastic resin are slightly dispersed. An average particle size of the bridged rubber particles is 0.1 to 50μm. An average value of a ratio of an area of the bridged rubber particles is 1 to 75% with respect to an area of thermoplastic resin in a film face. COPYRIGHT: (C)2008,JPO&INPIT |
