发明名称 |
Gas sensor with nanowires of zinc oxide or indium/zinc mixed oxides and method of detecting NOx gas |
摘要 |
A gas sensor is disclosed, which includes two separate metal electrodes on a surface of a substrate and a semiconductor thin film deposited on the surface of the substrate and connecting the two metal electrodes. The semiconductor thin film contains zinc oxide or a mixed oxide of zinc and indium, and the zinc oxide or the mixed oxide of zinc and indium are in the form of nanowires which constitute a gas-sensing surface of the semiconductor thin film. The nanowires have a diameter of 50-900 nm. The present invention also discloses a method for detecting the presence of a NOx gas.
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申请公布号 |
US2008006078(A1) |
申请公布日期 |
2008.01.10 |
申请号 |
US20070898677 |
申请日期 |
2007.09.14 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
CHUEH MIAO-JU;SU PI-GUEY;HUANG YIH-SHIAW;CHEN I-CHERNG;SHIH TUNG-SHENG |
分类号 |
G01N33/00 |
主分类号 |
G01N33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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