| 摘要 |
A vertical heat processing apparatus and its method are provided to prevent micro cracks from being formed at a rear portion of a process container by suppressing an excessive reaction of a control system of a heater. A vertical process container includes a transfer port at a lower portion thereof and receives a substrate to be processed therein. A support member supports the substrate in the process chamber in a vertical direction. A cover member tightly closes the transfer port. An elevator(62) elevates the cover member, while the support member is activated, such that the support member is loaded or unloaded on or from the process container. Gas supply systems(74,76,78) supply process gas to the process container. A ventilating system(70) ventilates the process chamber. A heater is arranged around the process container and supplies heat to a sidewall of the process container. A heat buffer member(98) surrounds the lower portion of the process container between the heater and the process container and decreases heat transfer efficiency of a heat line between the heater and the substrate to be processed.
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