| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature adjusting device for plate type works that can simultaneously and easily adjust the temperature of a plurality of plate type works spaced at predetermined spacings to precisely be processed. SOLUTION: The temperature adjusting device includes a shelf body 10 as a stacking means of stacking glass plates 16, 16, ..., as the plurality of plate type works to precisely be processed in parallel at the predetermined spacings to form a laminated body, an air supply unit 20 as an air supply means of supplying an air flow over the entire surface of one end side of the laminated body so that air flows as parallel flows to both surfaces of the glass plates 16, 16 , ..., and a temperature adjusting means comprising a heat exchanger 32 and a heater 30 which adjust the air flow to predetermined temperature. COPYRIGHT: (C)2008,JPO&INPIT
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