发明名称 PIEZO-ELECTRIC DEVICE AND ITS MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a piezo-electric device having excellent vibration characteristics by improving joining strength of wire bonding to a piezo-electric vibration piece while effectively preventing vibration leakage, and to provide its manufacturing method. <P>SOLUTION: The piezo-electric device provided with the wire-bonded piezo-electric vibration piece 32 and an object to be joined 45 joining the piezo-electric vibration piece 32 by using an adhesive 44 interposes a hard member 70 harder than at least the adhesive 44 between the joined face of the piezo-electric vibration piece 32 and the joined face of the object to be joined 45 by corresponding to a position 61a wire-bonding the piezo-electric vibration piece 32. The hard member 70 does not join any one or both of the piezo-electric vibration piece 32 or the object to be joined 45. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008003011(A) 申请公布日期 2008.01.10
申请号 JP20060174492 申请日期 2006.06.23
申请人 EPSON TOYOCOM CORP 发明人 ONO ATSUSHI
分类号 G01C19/56;G01C19/5621;G01C19/5628;H01L41/08;H01L41/18;H01L41/22;H01L41/29;H01L41/311;H01L41/313 主分类号 G01C19/56
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