| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring device which can achieve measurement in a steady operation state, while making noncontact scan to continuously detect thickness distribution, without being affected by ambient noise, temperature, dimension and surface condition of the measuring object, etc. SOLUTION: This thickness measuring device 100 comprises a sensor 11, a sensor holding means 12, a sensor moving means 13, a fixing member 14, a controller 15 and a display section 16, which is a coaxially-integrated combination of primary side exciting coil and secondary side induction coil. The sensor moving means 13 consists of a screw shaft 13a, a servomotor 13b and a bearing 13c, in which the servomotor 13b rotates the screw shaft 13a by using control signal from the controller 15 to transfer the sensor holding means 12 in the specified direction at the given speed. COPYRIGHT: (C)2008,JPO&INPIT
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