| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card suitable for use under high temperature, and to provide its manufacturing method. SOLUTION: In the probe card, an electrode 13 is formed in a pattern region 11 connected to the probe 5A for electric source, and an electrode plate 13B of the electrode 13 is made to face the pattern region 11 connected with a probe 5B for grounding. As a result, between a pair of electrodes of the electrode plate 13B and the pattern region 11 opposite to the electrode plate 13B, air interposed as a dielectric layer 14 of a capacitor 15 can be formed. Since a capacitor 15 is formed by having air interposed as the dielectric layer 14, even when it is used under high temperatures, generation of thermal stresses caused by the difference in thermal expansions, as in the case of insulating matter interposed between the electrodes can be prevented. COPYRIGHT: (C)2008,JPO&INPIT
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