| 摘要 |
PROBLEM TO BE SOLVED: To safely regenerate a cryopump in a device and method for cryopump control provided with a valve selecting whether or not inert gas supplied from an inert gas supply device when regenerating the cryopump is supplied to the cryopump. SOLUTION: Two inert gas supply passages are arranged between the cryopump 11 and the inert gas supply device 18, and also a first valve 26 is arranged in a branching pipe line 23, and a second valve 27 is arranged in a branching pipe line 24. COPYRIGHT: (C)2008,JPO&INPIT
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