发明名称 |
APPARATUS AND METHODS FOR REDUCTION AND COMPENSATION OF EFFECTS OF VIBRATIONS AND OF ENVIRONMENTAL EFFECTS IN WAVEFRONT INTERFEROMETRY |
摘要 |
A wavefront interferometry system including: a wavefront interferometer that during operation combines a reference beam from a reference object and a measurement beam from a measurement object to generate a combined beam; and a processor system programmed to processes the combined beam to concurrently generate therefrom a control signal and information about the difference in wavefront profiles of the reference and measurement objects, wherein the control signal controls a system parameter so as to maintain an optical path length difference between a spot on the reference object and a corresponding spot on the measurement object at a constant value mod 2p.
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申请公布号 |
WO2007019548(A3) |
申请公布日期 |
2008.01.10 |
申请号 |
WO2006US31066 |
申请日期 |
2006.08.08 |
申请人 |
ZETETIC INSTITUTE;HILL, HENRY, A. |
发明人 |
HILL, HENRY, A. |
分类号 |
G01B9/02 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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