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发明名称
摘要
申请公布号	JP2008500714(A)	申请公布日期	2008.01.10
申请号	JP20070514043	申请日期	2005.05.26
申请人		发明人
分类号	H01L21/20;H01L21/205;H01L21/316;H01L21/762;H01L21/77;H01L29/786;H01L51/00;H05K1/00;H05K1/05	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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