METHOD FOR MANUFACTURING CONDENSING SUBSTRATE AND METHOD FOR MANUFACTURING ELECTROOPTIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a condensing substrate having excellent optical properties with a high degree of precision.

SOLUTION: The method for manufacturing a condensing substrate comprises a process for forming a metallic foundation layer 62 by forming a film of a metallic material on one surface side of a substrate 61 by a plating method; a process for forming a pattern of a resist mask 64 on the metallic foundation layer 62; a process for forming a metallic mask 65 by forming a film of a metallic material on the metallic foundation layer 62 by a plating method through the resist mask 64; a process for removing the resist mask 64; a process for removing the metallic foundation layer 62 in the region where the resist mask 64 has been removed; and a process for partially removing the substrate 61 by executing dry etching processing to the substrate 61 through the metallic mask 65, and forming a groove part 67 on the substrate 61.

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