| 摘要 |
PROBLEM TO BE SOLVED: To obtain a high insulation chuck for prober having a short discharge time. SOLUTION: The chuck for prober which holds a wafer having an electronic device formed on the surface to come into contact with the backside thereof comprises a first conductor 61A coming into contact with the backside of the wafer, an insulating portion 61 made of an insulating material and provided beneath the first conductor 61A, and second conductors 61B and 62 provided beneath the insulating portion 61 wherein the insulating portion 61 is made of ceramics produced by sintering alumina having a purity of 99.7% or above and crystal particle size of less than 10μm. COPYRIGHT: (C)2008,JPO&INPIT |
